Lynford Goddard

Description

Address

Publications

  • 2015
    • Zhou, R. J.; Edwards, C.; Popescu, G.; Goddard, L. L., Semiconductor Defect Metrology Using Laser-Based Quantitative Phase Imaging. Quantitative Phase Imaging 2015, 9336, DOI:Artn 93361i DOI:10.1117/12.2078329.

    • Zhou, R. J.; Edwards, C.; Bryniaski, C. A.; Popescu, G.; Goddard, L. L., 9nm Node Wafer Defect Inspection Using Three-Dimensional Scanning, a 405nm Diode Laser, and a Broadband Source. Metrology, Inspection, and Process Control for Microlithography Xxix 2015, 9424, DOI:Artn 942416 DOI:10.1117/12.2085683.

    • Zhou, R. J.; Edwards, C.; Bryniarski, C.; Dallmann, M. F.; Popescu, G.; Goddard, L. L., White-Light Interferometric Microscopy for Wafer Defect Inspection. Quantitative Phase Imaging 2015, 9336, DOI:Artn 93362p DOI:10.1117/12.2079660.

    • Nguyen, T. H.; Majeed, H.; Edwards, C. A.; Do, M. N.; Goddard, L. L.; Popescu, G., Halo-Free Quantitative Phase Imaging with Partially Coherent Light. Quantitative Phase Imaging 2015, 9336, DOI:Artn 93360n DOI:10.1117/12.2080358.

    • Nguyen, T. H.; Edwards, C.; Goddard, L.; Popescu, G., Quantitative Phase-Shifting DIC Using Programmable Spatial Light Modulators. Quantitative Phase Imaging 2015, 9336, DOI:Artn 93360p DOI:10.1117/12.2080370.

    • Edwards, C.; Zhou, R. J.; Hwang, S. W.; McKeown, S. J.; Wang, K. Y.; Bhaduri, B.; Ganti, R.; Yunker, P. J.; Yodh, A. G.; Rogers, J. A.; Goddard, L. L.; Popescu, G., Diffraction Phase Microscopy: Monitoring Nanoscale Dynamics in Materials Science [Invited]. Applied Optics 2014, 53, (27), G33-G43, DOI:10.1364/Ao.53.000g33.

    • Edwards, C.; McKeown, S. J.; Zhou, J.; Popescu, G.; Goddard, L. L., In Situ Measurements of the Axial Expansion of Palladium Microdisks During Hydrogen Exposure Using Diffraction Phase Microscopy. Optical Materials Express 2014, 4, (12), 2559-2564, DOI:10.1364/Ome.4.002559.

    • Edwards, C.; Bhaduri, B.; Griffin, B. G.; Goddard, L. L.; Popescu, G., Epi-Illumination Diffraction Phase Microscopy with White Light. Optics Letters 2014, 39, (21), 6162-6165, DOI:10.1364/Ol.39.006162.

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